JPH0141561B2 - - Google Patents
Info
- Publication number
- JPH0141561B2 JPH0141561B2 JP15067383A JP15067383A JPH0141561B2 JP H0141561 B2 JPH0141561 B2 JP H0141561B2 JP 15067383 A JP15067383 A JP 15067383A JP 15067383 A JP15067383 A JP 15067383A JP H0141561 B2 JPH0141561 B2 JP H0141561B2
- Authority
- JP
- Japan
- Prior art keywords
- loading
- shelf
- filter
- unloading
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 15
- 238000005192 partition Methods 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000001012 protector Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15067383A JPS6044404A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15067383A JPS6044404A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2340767A Division JPH0649523B2 (ja) | 1990-11-30 | 1990-11-30 | クリ−ンル−ム内の荷保管設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6044404A JPS6044404A (ja) | 1985-03-09 |
JPH0141561B2 true JPH0141561B2 (en]) | 1989-09-06 |
Family
ID=15501968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15067383A Granted JPS6044404A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6044404A (en]) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61263502A (ja) * | 1985-05-16 | 1986-11-21 | Tokyo Electron Ltd | 清浄化装置 |
JPS61263503A (ja) * | 1985-05-16 | 1986-11-21 | Tokyo Electron Ltd | 清浄化装置 |
JPH032484Y2 (en]) * | 1985-08-30 | 1991-01-23 | ||
JPS62121102A (ja) * | 1985-11-20 | 1987-06-02 | Teru Saamuko Kk | 炉処理装置 |
JPS63116406U (en]) * | 1987-01-20 | 1988-07-27 | ||
JPH03249006A (ja) * | 1990-02-27 | 1991-11-07 | Daifuku Co Ltd | 除電装置付きの荷保管装置 |
JPH05132110A (ja) * | 1991-11-07 | 1993-05-28 | Daifuku Co Ltd | 除電装置付き荷捌装置 |
JP5772693B2 (ja) * | 2012-04-12 | 2015-09-02 | 村田機械株式会社 | 保管庫 |
CN102933013B (zh) * | 2012-10-29 | 2015-09-02 | 深圳市华星光电技术有限公司 | 一种堆垛机及静电消除装置 |
-
1983
- 1983-08-17 JP JP15067383A patent/JPS6044404A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6044404A (ja) | 1985-03-09 |
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